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基于PLC的功率半导体制造工厂空压机群集中控制系统设计与节能策略研究

Research on Centralized Control System Design and Energy Saving Strategies for Air Compressor Clusters in Power Semiconductor Manufacturing Plants Based on PLC

  • 摘要: 针对功率半导体制造工厂压缩空气系统存在的压力波动大、空载时间长、后处理协同不足及能耗管理粗放等问题,提出一种以PLC为核心的空压机群集中控制系统,系统围绕“主机、储气、干燥、配气、负载”链路,构建传感采集、执行联动、人机交互、通讯诊断和报警保护一体化架构,并以压力区间变负荷调节、运行时长均衡调度、峰谷电价分时储气和空载抑制休眠为主要节能策略。以某功率半导体制造车间空压站改造为例,结果表明该系统可将总管压力波动控制在±0.013 MPa以内,空载比下降11%,单位供气电耗下降9.6%,为功率半导体制造工厂空压机群集中控制提供实践参考。

     

    Abstract: To address challenges in compressed air systems for power semiconductor manufacturing plants—including significant pressure fluctuations, prolonged idle periods, insufficient post-processing coordination, and coarse energy management—we propose a PLC-centric centralized control system for air compressor clusters. The system establishes an integrated architecture encompassing sensor acquisition, actuator coordination, human-machine interaction, communication diagnostics, and alarm protection mechanisms, structured around the "main unit, gas storage, drying, gas distribution, and load" operational chain. Key energy-saving strategies include variable load regulation based on pressure ranges, balanced runtime scheduling, time-of-use gas storage with peak-valley electricity pricing, and idle suppression mechanisms. Case study from an air compressor station retrofit in a power semiconductor manufacturing workshop demonstrated that the system successfully maintained total pipeline pressure fluctuations within ±0.013 MPa, reduced idle ratios by 11 percentage points, and decreased unit gas supply power consumption by 9.6%. These findings provide practical references for centralized control systems in power semiconductor manufacturing plant air compressor clusters.

     

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