Abstract: To address safety risks and inefficiencies in traditional vacuum extraction operations, a multi-chamber intelligent processing system for GIS substations has been developed. The system employs a five-tier distributed architecture comprising hardware foundation layer, hardware abstraction layer, cloud platform layer, application backend layer, and application frontend layer. The hardware utilizes an integrated "5-chamber 7-valve" design to ensure excellent airtightness, while the software employs linear regression algorithms to achieve intelligent estimation of equipment chamber extraction duration. Experimental results show that the system supports real-time vacuum measurement and remote monitoring, improving operational efficiency by 44%, reducing maintenance costs, and enhancing safety and reliability. Additionally, it can be extended to various fields such as power, telecommunications, urban planning, and environmental protection, demonstrating broad application prospects.