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400 kV离子注入机控制系统的研制

Development of Control System for 400 kV Ion Implanter

  • 摘要: 对中国原子能研究院研制的400 kV离子注入机控制系统的设计与实现进行了深入探讨。首先,介绍了离子注入机及相关设备的组成结构,详细描述了设备的物理布局、系统架构设计,以及基于西门子PLC的下位机硬件设计和基于EPICS的上位机软件实现;其次,采用EPICS的OPI接口工具CS-Studio软件完成了离子注入机控制界面的设计;最后,探讨了各种抗干扰措施和安全联锁设计的具体实现并进行了现场调试。

     

    Abstract: The study provides an in-depth exploration of the design and implementation of the control system for the 400 kV ion implanter developed by the China Institute of Atomic Energy. First, it introduces the composition and structure of the ion implanter and its associated equipment, detailing the physical layout of the device, system architecture design, as well as the hardware design of the lower computer based on Siemens PLC and the upper computer software implementation using EPICS. Secondly, the design of the ion implanter control interface is achieved using the EPICS OPI tool, CS-Studio software. Finally, the study discusses the specific implementation of various anti-interference measures and safety interlock designs, along with on-site debugging.

     

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